CUHK - Electronic Engineering - ELEG5530 - Characterization Techniques in Semiconductor Technology

Objective
Electrical measurements and capacitance methods. X-ray diffraction; electron paramagnetic resonance; microscopy: optical, SEM, TEM, STM and related techniques. Surface analysis techniques: AES, XPS, SIMS, RBS, ion channelling. Optical methods: ellipsometry, photoluminescence, Raman spectroscopy.

Syllabus

 

Learning Outcome

 

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