This course covers principles and practice of state-of-the-art nanofabrication technology. These nanofabrication techniques are the foundation to build integrated devices and circuits with feature size below 100 nm and are widely employed in various areas such as nanoelectronics, nanophotonics, nanomechanics, and microfluidics. Students will learn to use the fabrication and characterization equipment available in the public cleanroom of the faculty of engineering. The top-down nanofabrication processes, such as lithography, etching, and thin-film deposition, etc. will be addressed. (For ELEG RPG & TPG students, ELEG undergraduate major and minor students as elective course.)