Objective
This course introduces the science and engineering of micro/nano-chip manufacturing. The manufacturing technology is the foundation to create integrated devices and systems with a feature size at the micrometer or nanometer level. The manufacturing processes are employed in multiple disciplines including microelectronics, optoelectronics, micro/nano-electromechanics, photonics, plasmonics, and microfluidics. Students will get comprehensive understanding of the manufacturing processes, environment, equipment, and applications of micro/nano-chips.
Syllabus
General introduction
Cleanroom
Photolithography
Electron-beam lithography
Soft lithography
Dry etching
Wet etching
Thin-film deposition
Sample inspection
Learning Outcome
1. Understand the fundamental principles of micro/nano-chip manufacturing.
2. Understand the safety issues and precaution measures of micro/nano-chip manufacturing.
3. Understand how to design the manufacturing processes according to the targeted applications.
4. Understand how to evaluate the manufacturing quality.
